• Up to 200 different station types / processes. • 35 different process blocks in a recipe. • Up to 120 Way / Time steps in a process block. • Logic recipe with arbitrary configurable carrier operations in a station. • Program recipe for arbitrary configurable station and / or carrier operations. Ex. tilt recipe, drum rotation... Home Prev. Next End © Turntech AB  Way/Voltage Way/Current Way/Logic Way/Progr.2 Way/Rectifier Way/Progr.1 Process recipe